Lithographic apparatus
WebA lithographic projection apparatus comprising: a support structure configured to hold a patterning device and movable in a scanning direction, the patterning device configured … Web18 dec. 2008 · Patent application title: Lithographic apparatus and device manufacturing method Inventors: Hendrik Antony Johannes Neerhof (Eindhoven, NL) Cornelis Maria …
Lithographic apparatus
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Web23 mei 2005 · Abstract: A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first … WebA lithographic apparatus, which uses extreme ultraviolet (EUV) radiation, having a wavelength within the range 4-20 nm, for example 6.7 nm or 13.5 nm, may be used to …
Web9. A lithographic projection apparatus arranged to project a pattern from a patterning device onto a substrate, the apparatus comprising: a substrate table configured to support a substrate and a sensor; a liquid supply system configured to provide liquid in a space between a projection system and a surface of the substrate table; and a controller … WebLithography method and lithography apparatus 申请号：JP2024566192 申请日：20151210 公开号：JP6792572B6 公开日：20241223 摘要：A method includes exposing number …
WebAn immersion lithographic apparatus includes: a projection system for projecting a patterned beam of radiation through an optical element of a final lens element of a … WebThe lithographic apparatus further comprises a lens for projecting radiation beam at the patterning device with a magnification of between 0.5× and 2×, a substrate table …
Web摘要： To provide an alternative method for vibration reduction of a lithographic apparatus.A lithographic apparatus has a shield that protects a functional subsystem …
Web22 dec. 2008 · [0009] Known lithographic apparatus include so-called steppers or step-and-repeat apparatus, and so-called scanners or step-and-scan apparatus. In a … birthday activities for toddlersWebA lithographic apparatus comprising a projection system configured to project a patterned radiation beam to form an exposure area on a substrate held on a substrate table, the … birthday activities in gold coastWebTo provide an improved conduit system, the lithographic apparatus further includes a control system which is used to control the movement of the object based on … birthday activities in singaporeWebThe lithographic apparatus according to claim 4, wherein the first seal, the second seal and/or third seal comprises any one or combinations of acrylic rubber, butadiene rubber, … birthday activities in los angelesWebIn a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas … daniels top of the poconos family resortWeb1. A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate through a liquid confined in a space adjacent the substrate and along a beam path in the space, the apparatus comprising: a liquid confinement structure configured to at least partly confine the liquid in the space, the liquid confinement structure having, a liquid … daniels top of the poconos resortWeb29 nov. 2012 · The lithographic apparatus component of claim 2, wherein the lithographic apparatus component is a projection system wall, a substrate table, a mirror, a heat sink … birthday activities in maryland